Reference samples

Thin Film XRF reference samples

Advantages of Thin Film XRF reference samples:

  • Absorption free standard: no matrix correction necessary
  • Substrate thickness of 200 nm permits transmission measurements and leads to low background from the substrate
  • Mass depositions in the range of ng/mm2 (1-3 atomic layers) permit quantification without the need to interpolate from higher values
  • Uncertainty = 1 ng/mm² (1 atomic layer)
  • Wide selection of non-overlapping XRF lines, exact calibration curve with many points over a large energy range
  • Signal strength easily adjustable by thickness, similar intensity for all elements
  • High degree of uniformity & homogeneity (better than 1% for the full sample area)
  • Application for adjustment of confocal μ-XRF possible
  • Wide range of available elements (standard and tailored compilations)

Download: Reference sample prospectus (pdf)

New Reference Samples:
AXO DRESDEN has been fabricating and selling the successful Thin Film XRF reference samples type "RF"for several years. As customers have been asking for different material compositions, we are planning to develop and provide one or two new series soon. In order to meet your demands we created an information sheet of what is available and what could be provided in the future. You can download it here: Info-PDF.
Please give us your feedback, ideas and suggestions personally, by e-mail.

Mass deposition of the elements on the reference sample with corresponding fluorescence emission line energies.

Lateral homogeneity measured by XRF μ-beam mappings

Energy spectra of three 7-element reference samples. The energy range from ~2 keV to ~40 keV is covered with peaks of comparable intensity.

X-ray fluorescence reference sample with up to 7 different elements on a silicon nitride membrane (above), PEEK sample holder (right).

The sample is available with or without a PEEK sample holder (typical diameters 30 mm or 49 mm, others on request). The sample frame size is 10x10 mm² or 5x5 mm², having a 5x5 mm² or 2x2 mm², respectively, usable coated membrane area. Other sizes available on request.

PEEK sample holder


SEM characterization materials

EDS-TM002 is a test material for the performance check of an X-ray spectrometer attached to a SEM developed in cooperation with BAM, Berlin, Germany.
It is fabricated as a compact material (size: 8×8×0.5 mm³).

EDS-TM002 can be purchased from the BAM webshop.

Photo of EDS-TM002 (left) and energy spectrum recorded with 10 kV (right).

XRR Teaching Tool

The teaching tool for X-ray reflectometry consists of three typical samples: a silicon substrate, a thin Ni single layer and a 10-period Ni/C-multilayer. The specular reflected intensity is measured as a function of grazing incident angle. Each measurement shows a characteristic pattern. Basic principles of total external reflexion and the interference of reflected and diffracted X-rays in a layer stack can be discussed. Layer thicknesses and interface roughnesses are determined by selected simulation programs.

Further, the set contains an introduction into X-ray reflectometry on CD-ROM.

The thin films are deposited by means of Ion Beam Deposition (IBD) on round flat Si-substrates (1 inch diameter). 

Teaching tool for X-ray reflectometry: pure silicon substrate, Ni single layer, 10 period Ni/C-multilayer


Concept of sample selection:
1. one interface bulk material / air
2. single layer with two interfaces
3. multilayer system with many interfaces

Application Training and further education of students, scientists, skilled workers, ...
Determination of morphological parameters: layer thickness, material density, surface and interface roughness