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A new quality in in-house X-ray reflectometry |
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Special features |
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A new quality in X-ray diffractometry - secondary parallel beam optics |
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Better resolution than soller slits because of a more than two times lower angular acceptance |
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- Easy and fast sample alignment
- Sample alignment within 10 seconds
- Dynamic range of more than 7 orders of magnitude (cross intensity I > 3 · 109 cps)
- No influence of sample displacement errors up to 200 µm on peak position and intensity
- Low divergence (Cu Ka : Df < 0.03°)
- Detectable thin film thicknesses between
2 nm and 270 nm
Upgrades available for
Cr Ka, Co Ka, Cu Ka, Mo Ka, Ag Ka radiation
Geometries on customers request
Twin Mirror Arrangement consisting of primary mirror with housing (left) and secondary mirror with housing, beam tube and detector slit holder (right)
Setup of Twin Mirror Arrangement (TMA)
Twin Mirror Arrangement
- Increased S/N-ratio due to sample fluorescence suppression
- Transmission higher than 60 %
- Fits best to primary parallel beam optics
- Parallel beam geometry:
- simplified sample preparation
- increased accuracy
Powder diffraction measurements in the angular range of the quartz triplet in parallel beam geometry (TMA) (a) and BRAGG-BRENTANO geometry (b)
X-ray reflectometry: Independence of peak intensities and angular positions at three different stage heights
superior Kb suppression (I Cu Ka1 : I Cu Kb > 1.000.000 : 1 (q – 2q – scan at Si (400) wafer))