Beam Compressor
of a 1-dimensional compressed parallel beam

 

Special features

  • Combination of a focusing and a convex bent collimating multilayer optics
  • Adjustable beam width b at sample position
  • Emission of a compressed parallel sub-millimeter beam
  • Generation of a monochromatic (Ka1+2)
    parallel spot with a width
    0.25 mm < b’ < 1.0 mm

Cu Ka-reflectance of a Ni/C graded multilayer
at d= 3.66 nm (gradient
Dd/Dx = 2 x 10-8), measured in Y-direction perpendicular to gradient of period thickness

Application:
sub-millimeter X-ray-reflectometry

  • Ni/C gradient multilayer:
    direction of period thickness gradient (X)
    perpendicular to beam direction (Y)
  • spot size of the compressed Cu Ka1,2
    2 -X-ray beam (Z x X) 0.3 mm x 0.6 mm

Reflectometry result:
No remarkable peak broadening at high peak intensities

X-Ray Optics

High Precision Deposition

System Upgrade

X-Ray Optical Systems

Beam Compressor

Collimating Monochromator

Twin Mirror Arrangement

Beam path and main parameters of a beam compressor

Reference Samples